Objective
A process enfineer position for advanced thin film process research and development

Qualifications
-Eleven years of direct experience in Thin Film Deposition; familiar with various thin film process techniques, such as CMP, lithography, etch, clean tech.
-Unique background in both academic training (PhD in Material Science) and industry application (6 years in Semiconductor Foundry), with eleven technical papers and one US patent published
-Strong technical skills in developing & analyzing manufacturing processes and their relationship with product performance
-Hands-on laboratory experience in clean room techniques, thin film process and thin film characterization using various equipments

-Self-starter, and always have a positive can do attitude
-Strong technical communication and inter-personal skills
-Innovative and inquisitive

Laboratory Skills
Process Equipments:
Chemical Vapor Deposition (CVD)
Physical Vapor deposition (PVD)
Pulsed Laser Deposition (PLD)
Spin Coating
Rapid Thermal Annealing (RTA)

Characterization Tools:
Structure Analysis: FTIR, Raman, XRD
Morphology analysis: SEM, TEM, AFM, Surface profiler
Composition Analysis: SIMS, XPS
Film Stress: stress Gauge
Film Thickness & Refractive Index: ellipsometer
Sheet Resistance: four-point probe

Analytical Tools & Others:
Design of Experiments (DOE): JMP
Statistical Process Control (SPC)
Problem solving and decision making technique (PSDM)
Failure mode and effect analysis (FMEA)


Experience
20092010 Scientist(R&D), Eectrochem Solutions, Raynham, MA
-Advanced battery research and characterization for Li oxyhalide primary battery
2003 2008 PhD. in Material Science, Singapore-MIT Alliance, Singapore-Boston
-Development of nanocrystalline Al thin films as anode for Li-ion battery application
Major Accomplishments:
-This work established basic understanding on the impact of alloying species, crystallite size and phase formation of Al-based alloy materials on battery performance.
-Research results were published in Journal of the Electrochemical Society.

2001 2003Sr. Engineer(Process Integration)Chartered Semi. Mfg., Singapore
-Work closely with process engineers, operations and test group to develop high performance products
-Monitor in-line process, E-test results, execute Design of experiments (DOEs) to optimize and improve product performance
Major Accomplishments:
-Successfully developed 0.22 and 0.13m products for volume manufacturing
-Able to meet production schedule and deliver high performance product
-Promoted to Sr. engineer within one year due to excellent achievement

1999 2001Research Engineer (R&D, Thin Film)Chartered Semi. Mfg., Singapore
-Work closely with integration team, operation, process engineers, develop high quality, stable thin film process for new product
-Execute Statistical Process Control (SPC) and Design of experiments (DOEs) for process stability control and optimization
-Startup and qualification of process tool
Major Accomplishments:
-Successfully developed thin film processes such as SiN, silicon oxide and SiON, for 0.18m & 0.13m products using PECVD, SACVD, HDPCVD.
-Improved yield from 60% to 90% by developing innovative low hydrogen concentration SiN thin film
-Four conference papers were published on VIMIC, DUMIC and MRS.

1997 1999 Engineer Associate Chartered Semiconductor Mfg., Singapore
-Develop and Characterize Low k materials for ULSI interconnects
-Five journal papers, one conference paper and one patent were published

Education
2003 2008PhD in Material Science and Engineering, Singapore-MIT Alliance, Singapore-Boston, MA
1997 1999 MS in Physics, National University of Singapore, Singapore
1993 1997BS in Physics, Ji Lin University, ChangChun, P.R.China

- Reference Available on Request -